Properties of Trichlorosilane (TCS)
Basic Physical Properties of Trichlorosilane
Trichlorosilane is produced by blowing hydrogen chloride through a bed
of silicon powder at 300°C. There, they
combine to make Trichlorosilane and hydrogen according to the chemical
equation:
Si + 3 HCl → SiHCl3 + H2
Chemical Structure:
| Properties |
|
| |
|
| Molecular Formula |
SiHCl3 |
| Relative Density |
1.342 g/cm³ |
| Relative Gas Density (air = 1) |
4.7 |
| Refractive Index |
1.4020 |
| Melting Point |
- 126.5°C |
| Boiling Point |
31.8°C |
| Flash Point (open cup) |
- 13.9°C |
| Saturated Vapor Pressure (14.5°C) |
53.33 kPa |
| Specific Heat Capacity |
0.96 J/(g.°C) |
| Heat Evaporation |
195.4 J/g |
| Critical Point 5.11 atm |
- 56.6°C |
| Critical Temperature |
234°C |
| Critical Pressure |
3.63 MPa |
| Surface Tension |
14.3 1x10³N/m |
| Kinematic Viscosity (25°C) |
0.23 mm²/s |
| Expansion Coefficient |
0.0019 |
| Spontaneous Ignition Temperature |
175°C |
| Lower Explosion Level |
6.9 % |
| Upper Explosion Level |
70 % |
| Dipole Moment |
0.97 |
| Heat of Formation |
- 482 kJ/mol |
| |
|
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